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LEVITRONIX INNOVATIVE SOLUTIONS
BPS-I30
MAGLEV FAN TECHNOLOGY
FOR HARSHEST ENVIRONMENTS
REVOLUTIONARY MAGNETICALLY
LEVITATED CENTRIFUGAL PUMP
- Replacement of peristaltic pumps on Mirra tool
- Slurry delivery from drum (no delivery loop)
- Wide flow range: 20 – 300 mL/min
- Flow accuracy:
- - 2% for flow range of 100 - 300 mL/min
- - 5% for flow range of 20 - 100 mL/min
- (2% after initial calibration)
Levitronix® has developed a revolutionary axial fan that has no bearings to wear out or seals to break down.SYSTEM BENEFITS
◼ Chemically resistant design for exposure to
aggressive media.
◼ Certified for use in explosive atmospheres.
◼ Closed-loop flow or pressure control possible with
additional sensor.
◼ Ultra-low particle generation and maintenance due to
lack of bearings and dynamic seals.
◼ Hermetically sealed with single material in media
contact - no safety or integrity concerns.
◼ Inline washdown with aggressive cleaning agents
possible, e.g. to remove photo-resist deposits.
◼ Low vibration due to active unbalance compensation
- Extremely low particle generation due to the absence of mechanically contacting parts. Reduces particle contamination issues in wet processes by generating 10 to 50 times fewer particles compared to other pumps.
- Increases equipment uptime.
- Lower maintenance costs by eliminating valves, bearings,rotating seals and costly rebuilds.
- Reduced risk of contamination due to the self-contained design with magnetic bearings.
- Very gentle to sensitive fluids due to low-shear design.
- No narrow gaps and fissures where particles or microorganisms could be entrapped.
- Smooth, continuous flow without pressure pulsation.
- Electronic speed control.
- Compact design compared to pneumatic and magdrive pumps. Saves valuable space in process tools by having a smaller footprint.
- Proven technology in medical and semiconductor industry (MTBF > 50 years).