MERCURY SRL

MERCURY SRL

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MERCURY SRL

Ultra-High-Purity Solutions Let's Innovate Together

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Process Technology designs and manufactures thermal solutions and power supplies to meet the most stringent cleanroom, ultra-high-purity (UHP) processes, and customer requirements of the Semiconductor and Wafer Processing industries.

Innovating Processes and Automation

 

Continuously improving our products and processes through advanced design, engineering, technology, digitization, production and training.

Applications

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Flammable Solvent Heating

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Products designed to safely heat IPA and low flash-point solvents, meeting the most stringent cleanliness requirements to support next-generation semiconductor node technologies.

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SHB/SHC

Frontier Inline Heater

Safe indirect, low-watt, multi-loop heating of acids and solvents with all PFA wetted surfaces. Allows for precise and stable temperature control of multiple chambers.

Low wattage, delivers superior indirect heating for chemicals and solvents. Choose SHB/Electropolished 316SS for solvents or SHC/PTFE & PFA wetted surfaces for acids and solvents.

Powerful, safe heating for flammable and non-flammable chemistries in hazardous operating environments using electropolished 316SS wetted surfaces for improved cleanliness. Outstanding performance.

Ultra-High-Purity Heating

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Designed with Ultra-High-Purity processes in mind, Process Technology delivers clean-room assembled, reliable heating and power solutions to fit specific needs.


Lufran® Chemical Heater

Chemheat

TIH Steam

New – Compact heating solution for wet-process non-flammable chemistries. All PTFE tubing eliminates environmental exposure. Suitable for single or recirculating applications. Fast heat-up.

Constructed with stainless steel wetted materials for heating a variety of chemicals. Suitable for single pass or recirculating applications. Complete high-wattage turn-key solution. Heats up to 356°F (180°C)

Designed for durability, performance and safety while heating chemicals/acids or ultrapure DI Water. PTFE surfaces for permeation protection. Suitable for single pass, recirculating and steam applications.

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TIH

SHX Inline Heater

Lufran® DI Water

Designed for durability, performance and safety while heating chemicals/acids or ultrapure DI Water. PTFE surfaces for permeation protection. Suitable for single pass or recirculating and steam applications.

NEW – High-performance heater with PTFE components to safely heat isopropyl alcohol (IPA). Supports the stringent cleanliness requirements of next generation node technologies. Heats up to 194°F (90°C). Explosion proof design (SHX-EX) also available.

Best-in-class! Utilizing PTFE and PVDF wetted surfaces for highly-critical, for highly-critical clean manufacturing processes, using DI Water. Advanced temperature control system. 99% energy efficient! Heats up to 194°F (90°C)